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MEMS ELECTROSTATIC MICRO MIRRORS TM10 AND TM2520

Electrostatic driven mirrors combine the high pointing stability and the high fill factor required typically in fiber optic components. The micromirror is designed to minimize effects such as drift, hysteresis and temperature dependent performance. The angle is set using electrostatic actuation.

Electrostatic driven mirrors combine the high pointing stability and the high fill factor required typically in fiber optic components.

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The sercalo MEMS 3D mirrors are used for precise optical beam steering. To avoid an optical feed back loop, the micromirror is designed to minimize effects such as drift, hysteresis and temperature dependent performance. The angle is set using electrostatic actuation.

Electrostatic driven mirrors combine the high pointing stability and the high fill factor required typically in fiber optic components. A driver electronics is available on request.

Model TM10

#FEATURESAPPLICATIONS
1 • Low drift • Optical Beam Steering
2 • 2 independent axes • Reconfigurable Add-Drop Multiplexer
3 • Continuous tilting • Vibration control in free space optics
4 • Single mirror • Optical Processor
5 • Ø 1.0 mm diameter mirror • Aerospace
6 • High fill factor  

Model TM2520

#FEATURESAPPLICATIONS
1 • Low drift • Optical Beam Steering
2 • 2 independent axes • Reconfigurable Add-Drop Multiplexer
3 • Continuous tilting • Vibration control in free space optics
4 • Single mirror • Optical Processor
5 • 2.0 x 2.5 mm2 mirror • Aerospace
6 • High fill factor  

TECHNICAL SPECIFICATIONS (All designs) TM10

 UnitMinTypMax
Max actuation Voltage V   40 200
Surface finish - Gold or Aluminium
Reflectivity (900-2000 nm)  %   95  
Mirror Size X mm 1.0    
Mirror Size Y mm 1.0    
Mirror Radius of Curvature m 1.0   (up to 5°)
Tilt Angle – X (Mechanical) @ 40 V  deg   ±3.5°  
Tilt Angle – Y (Mechanical) @ 40 V  deg   ±3.5°  
Resonant Frequency X Hz   >700  
Resonant Frequency Y Hz   >700  
Package TO46
ESD

Unprotected = VERY SENSITIVE
Overvoltage above 45 V can permanently damage the device.

TECHNICAL SPECIFICATIONS (All designs) TM2520

 UnitMinTypMax
Max actuation Voltage V   60 70
Surface finish - Gold or Aluminium
Reflectivity (900-2000 nm)  %   95  
Mirror Size X mm 2.5    
Mirror Size Y mm 2.0    
Mirror Radius of Curvature m 1.0   (up to 5°)
Tilt Angle – X (Mechanical) @ 60 V  deg   ±4.5°  
Tilt Angle – Y (Mechanical) @ 60 V  deg   ±2.5°  
Resonant Frequency X Hz   170  
Resonant Frequency Y Hz   360  
Package TO5
ESD

Unprotected = VERY SENSITIVE
Overvoltage above 70 V can permanently damage the device.

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  + 41 32 732 15 20
  + 41 32 732 15 29
  info@sercalo.com

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