MEMS ELECTROSTATIC MICRO MIRRORS TM10 AND TM

Electrostatic driven mirrors combine the high pointing stability and the high fill factor required typically in fiber optic components. The micromirror is designed to minimize effects such as drift, hysteresis and temperature dependent performance. The angle is set using electrostatic actuation.

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DATASHEET

The sercalo MEMS 3D mirrors are used for precise optical beam steering. To avoid an optical feed back loop, the micromirror is designed to minimize effects such as drift, hysteresis and temperature dependent performance. The angle is set using electrostatic actuation.

A driver electronics is available on request.

Model TM10

FEATURES
• Low drift
• 2 independent axes
• Continuous tilting
• Single mirror
• Ø 1.0 mm diameter mirror
• High fill factor
APPLICATIONS
• Optical Beam Steering
• Reconfigurable Add-Drop Multiplexer
• Vibration control in free space optics
• Optical Processor

Model TM2520

FEATURES
• Low drift
• 2 independent axes
• Continuous tilting
• Single mirror
• 2.0 x 2.5 mm2 mirror
• High fill factor
APPLICATIONS
• Optical Beam Steering
• Reconfigurable Add-Drop Multiplexer
• Vibration control in free space optics
• Optical Processor

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Since 1999 Sercalo is leader in Optical MEMS components. Our skills span the entire process of manufacture: MEMS chip design, fabrication and marketing.

Sercalo Microtechnology Ltd.
  Rue des Draizes 5,
     CH 2000 Neuchâtel
     Switzerland
  + 41 32 732 15 20
  + 41 32 732 15 29
  info@sercalo.com

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