For precision springs, ultra flat mechanical parts and applications usesd in watchmaking, silicon micro mechanics offers unrivaled precision. Sercalo runs an in house MEMS foundry that proposes MEMS foundry services for the production of single and multi-level parts in silicon. 

The Sercalo MEMS foundry manufactures silicon precision micro parts based on deep reactive ion etching. This MEMS foundry technology achieves better precision and surface quality compared to traditional machining techniques such as milling or laser.

Our MEMS foundry service team has over 20 years experience in etching optically flat surfaces. On this technological base we offer MEMS foundry etching services for ultra precise silicon micro parts of unmatched surface quality. 

Minimum feature size can be as low as 5 µm with an aspect ratio up to 50, i.e. parts can be made out of structures with beams that are 5 µm wide and 250 µm tall.

Typically, the parts are made out of 1 layer, but also 2 and 3 layered designs are possible.

Structure height is between 100 µm up to 400 µm.

1 Precision < 1 µm 2-D Fiber arrays
2 Vertical walls Silicon Hairspring
3 Up to 400 µm thick parts Micro Optical Bench
4   Surface Treatments



About our MEMS foundry services

MEMS foundry services provide a way for companies to design and manufacture MEMS (microelectromechanical systems) devices without having to invest in their own expensive and specialized manufacturing facilities. MEMS foundries offer a wide range of services, including:

  • Design support: MEMS foundries can help companies with the design of their MEMS devices, from concept to final product.
  • Wafer fabrication: MEMS foundries can fabricate MEMS devices on silicon wafers. This process involves depositing thin films of materials, patterning them using photolithography, and etching them to create the desired structures.
  • Packaging: MEMS foundries can package MEMS devices to protect them from the environment and to make them easier to connect to other devices.
  • Testing: MEMS foundries can test MEMS devices to ensure that they meet the required specifications.

Benefits of using MEMS foundry services

There are many benefits to using our MEMS foundry services, including:

  • Reduced costs: our MEMS foundries can help companies to reduce the costs of developing and manufacturing MEMS devices. This is because MEMS foundries have the economies of scale and expertise to manufacture MEMS devices more efficiently than most companies can.
  • Faster time to market: our MEMS foundries can help companies to get their MEMS devices to market faster. This is because our MEMS foundries have the expertise and infrastructure to quickly and efficiently manufacture MEMS devices.
  • Access to expertise: our MEMS foundries have a deep understanding of MEMS design and manufacturing. This expertise can be invaluable to companies that are new to MEMS or that need help with a particular aspect of MEMS development.

Applications of our MEMS foundry services

MEMS foundry services are used in a wide variety of applications, including:

  • Watchmaking: our MEMS devices are used to make ultraprecise silicon watch components.
  • Automotive: our MEMS devices are used in automotive applications.
  • Aerospace: our MEMS devices are used in aerospace applications.

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