TM10 | Rev. 90-1144-7
MEMS ELECTROSTATIC MICRO MIRRORS TM10 | Rev. 90-1144-7
To avoid an optical feedback loop, the micro mirror is designed to minimize effects such as drift, hysteresis and temperature dependent performance. The angle is set using electrostatic actuation.
Electrostatic driven mirrors combine the high pointing stability and the high fill factor required typically in fiber optic components.