Dual-axes electrostatic MEMS mirror TM
- Dual-axes, High fill factor
- +/-4° Mechanical tilt
- Static beam steering
- Low-drift
- Low power consumption
- Our Electrostatic MEMS Mirror operate with minimal power consumption, leading to energy-efficient operation and reduced heat generation.
- High Reliabilty
- Our Electrostatic MEMS Mirror are renowned for their high reliability and long operational lifetimes.
The TM electrostatic MEMS mirrors are designed for static beam steering and to minimize effects such as drift, hysteresis and temperature dependent performance. These dual-axes mirrors with up to 2.5mm aperture are driven with an electrostatic comb drive at a tilt angle of up to +/-4°.
Electrostatic MEMS mirrors combine the high pointing stability and the high fill factor required typically in fiber optic components. Sercalo uses these mirrors for the SC and TF product lines.
Operating Principle
Sercalo's Electrostatic MEMS mirrors are constructed as a compact chip that combines the mirror surface, comb-drive actuator, and torsion bars acting as mechanical springs. The underlying operating principle is based on the generation of electrostatic forces that move the mirror. The torsion bars both support the mirror and provide a restoring force that stabilizes and limits the rotation, ensuiring precise prositioning.
Electrostatic drive has excellent static performance and is the solution of choice for advanced fiber optic light processing such as in MEMS variable optical attenuators, fiber optic switches and tunable optical filters.
Ordering information for Dual-Axes Electrostatic MEMS mirror TM
Please use the product configurator below to select available options for the Dual-Axes Electrostatic MEMS mirror TM product line and/or leave us a message with the contact form. If you are not sure about the exact configuration we will reply to discuss the best options with you. Please note that for technical reasons certain configurations are not possible. We also create custom designs according to your specific requirements outside of our standard product line.
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Sercalo is a leading manufacturer of optical MEMS components for a wide range of applications. The company develops and manufactures high-quality optical MEMS products.
Sercalo is committed to delivering top-notch optical MEMS components and services, constantly investing in research and development to engineer cutting-edge optical MEMS solutions that meet the ever-evolving needs of its customers.
