MEMS foundry
MEMS foundry for MICROFABRICATION OF PARTS IN SILICON
Sercalo runs a MEMS Fab (also called MEMS foundry) in house that proposes microfabrication foundry services producing single and multi-level parts in silicon.
The Sercalo MEMS foundry manufactures silicon precision micro parts based on deep reactive ion etching. This MEMS foundry technology achieves better precision and surface quality than traditional machining techniques such as milling or laser. Our MEMS foundry service team has over 20 years experience in etching optically flat surfaces. Based on this technological expertise, our MEMS foundry offers etching services for ultra precise silicon micro parts of unmatched surface quality. Minimum feature size can be as low as 5 µm with an aspect ratio up to 50, i.e. parts can be made out of structures with beams that are 5 µm wide and 250 µm tall. Typically, the parts fabricated in our MEMS foundry are made out of 1 layer, but also 2 and 3 layered designs are possible. Structure height is between 100 µm up to 400 µm.
Your MEMS solution only a click away
Along with a range of standard products also available through its global distribution network, Sercalo offers personalized services through its MEMS foundry for the design of custom optical MEMS or other types of silicon micro parts. Get in touch, we are ready to create with you optimal and sustainable solutions.
Core technology: Deep reactive ion etching (DRIE)
Sercalo's MEMS foundry specializes in manufacturing silicon precision micro parts using Deep Reactive Ion Etching (DRIE), often referred to as the Bosch process. This advanced anisotropic etching technique allows for the creation of structures with nearly vertical sidewalls, achieving significantly better precision and surface quality than traditional machining methods like milling or laser cutting. The process is critical for producing the highly specialized components, such as the micro-mirrors and seismic elements, that power Sercalo's optical MEMS devices.
Unmatched precision and surface quality
The Sercalo MEMS foundry leverages over 20 years of experience in etching to produce ultra-precise silicon micro parts, focusing particularly on achieving optically flat surfaces. This is a critical requirement for devices used in demanding optical paths, like the Tunable Optical Filter (TF), where surface quality directly impacts insertion loss and signal integrity.
Custom solutions and services
Beyond manufacturing its standard product lines (like the FOA and TF), the Sercalo MEMS foundry offers personalized services for clients seeking unique solutions:
- Custom optical MEMS: The foundry is equipped to design and fabricate tailor-made optical MEMS components, allowing customers to realize specifications that are not available in standard catalog products.
- General silicon micro parts: The services extend to manufacturing other types of silicon micro parts that benefit from the extreme precision and high aspect ratio capabilities of their DRIE process.
Sercalo emphasizes a collaborative approach, inviting customers to engage with their experienced MEMS foundry service team to create optimal and sustainable solutions for custom microfabrication needs.
