MM2536-2 Dual-axes magnetic MEMS mirror
- Dual-axes
- +/-5° Mechanical tilt
- Static and dynamic beam steering
- Linear actuation
MEMS mirrors
MEMS mirrors offer several advantages over traditional moving mirrors, including small size, low power consumption, and high precision.
A MEMS mirror (also known as tilt-tip mirror) is a miniature reflective device that leverages microelectromechanical systems, better known as MEMS technology, to steer or modulate light beams with exceptional precision. Our MEMS mirrors are fabricated on silicon substrates and integrate a reflective element with a micro-scale actuator (electromagnetic or electrostatic) that finely controls the MEMS mirror’s position allowing for rapid and highly controlled angular deflections.
MEMS mirrors are at the heart of many modern optical systems. In LiDAR, MEMS mirrors rapidly steer laser beams to generate detailed spatial maps, while in projection displays and biomedical imaging, MEMS mirrors help form dynamic, high-resolution images. The ability of MEMS mirrors to provide fast, low-power, and highly accurate light steering makes them indispensable in cutting-edge optical applications.
Sercalo's engineering team designs, manufactures and tests each component, assuring the high quality and reliability that characterize all our optical MEMS mirror products.
Operating Principle
Sercalo's MEMS mirrors are constructed as a compact chip that combines the mirror surface, drive actuator, and torsion bars acting as mechanical springs. The underlying operating principle is based on the generation of attractive or repulsive forces that move the MEMS mirror. The torsion bars both support the MEMS mirror and provide a restoring force that stabilizes and limits the rotation, ensuring precise positioning.
Electrostatic MEMS mirrors are based on comb drive actuators where a high voltage is applied on a single electrode. The comb drive creates a rotation on the mirror as it tries to minimize the distance between two electrodes. Electrostatic drives have excellent static performance and are the solution of choice for advanced fiber optic light processing such as in MEMS variable optical attenuators, optical MEMS switches and MEMS optical tunable filters. MEMS mirror diameters range from 0.8 mm up to 2.5mm.
Magnetic MEMS mirrors are based on voice coil actuators using the Lorentz force. When current passes through a coil embedded around the mirror and interacts with an externally applied magnetic field, a torque is produced that induces controlled rotation. Compared to traditional magnetic MEMS mirrors, Sercalo products are designed to redirect the magnetic fields to a specific zone in order to increase performance at low power consumption, allowing for larger MEMS mirrors with diameters up to 16mm. Both pointing and dynamic scanning are possible.
Sercalo's engineering team is actively developing integration of adaptive control algorithms to mitigate issues such as mechanical ringing and thermal drift, thereby enhancing the operational stability and accuracy of our products.
