MEMS ELECTROSTATIC MICRO MIRRORS

Electrostatic driven MEMS mirrors are used in applications where a high pointing stability is required. The electrostatic drive has better DC performance and is the solution of choice for advanced fiber optic light processing such as in MEMS variable optical attenuators, fiber optic switches and tunable optical filters. Mirror diameters range from 0.8 mm up to 2.5 x 2.0 mm.

A driver electronics is available on request.

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DATASHEET

The sercalo MEMS 3D mirrors are used for precise optical beam steering. To avoid an optical feed back loop, the micromirror is designed to minimize effects such as drift, hysteresis and temperature dependent performance. The angle is set using electrostatic actuation.

A driver electronics is available on request.

Model TM2510

FEATURES
• Low drift
• 2 independent axes
• Continuous tilting
• Single mirror
• 1 mm diameter mirror
• High fill factor
APPLICATIONS
• Optical Beam Steering
• Reconfigurable Add-Drop Multiplexer
• Vibration control in free space optics
• Optical Processor

Model TM2520

FEATURES
• Low drift
• 2 independent axes
• Continuous tilting
• Single mirror
• 2.0 x 2.5 mm2 mirror
• High fill factor
APPLICATIONS
• Optical Beam Steering
• Reconfigurable Add-Drop Multiplexer
• Vibration control in free space optics
• Optical Processor

ELECTROSTATIC MICRO MIRRORS - TM10 AND TM2520

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sercalo logoSercalo is a leading supplier for MOEMS components. Our know-how covers the process from MEMS fabrication to assembly. 


Sercalo Microtechnology Ltd.
  Rue des Draizes 5,
     CH 2000 Neuchâtel
     Switzerland
  + 41 32 732 15 20
  + 41 32 732 15 29
  info@sercalo.com