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SPECIALTY MEMS - MEMS MIRRORS

MEMS Galvanometers

Sercalo's MEMS Galvanometer is a miniature scanner for advanced optical beam steering and pointing. It can be used for static or dynamic beam steering. The 1-D has an optical position monitor for closed loop operation. It has a mirror diameter up to 14 mm.  It's best suited in applications where small size and low power consumption are important. It offers a response time of 1 ms and a mechanical rotation of +/- 5

The 2-D devices are operated in open loop and are currently available with a mirror diameter of 2.5X3.6mm.

Micro MIRRORS

Electrostatic ​Micro-mirrors

Sercalo produces MEMS Micromirrors based on different technologies:

Electrostatic driven MEMS mirrors are used in applications where a high pointing stability is required. The electrostatic drive has better DC performance and is the solution of choice for advanced fiber optic light processing such as in MEMS variable optical attenuators, fiber optic switches and tunable optical filters. Mirror diameters range from 0.8 mm up to 2.5 x 2.0 mm.

The Magnetic MEMS micro-mirrors offer larger diameters and are best suited in applications requiring DC pointing together with dynamic scanning. Magnetic 1-d and 2-d micromirrors have a linear current angle response.

Sercalo's engineering team designs, manufactures and tests each component assuring in this way the high quality and reliability that characterize all Sercalo products.